Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413321 | Method and apparatus for reducing particle contamination on wafer backside during CVD process | Mario D. Silvetti, Ameeta Madhava, Davood Khalili, Martin Jay Seamons, Emanuele Cappello +2 more | 2002-07-02 |
| 6355571 | Method and apparatus for reducing copper oxidation and contamination in a semiconductor device | Judy H. Huang, Christopher Dennis Bencher, Sudha Rathi, Christopher S. Ngai | 2002-03-12 |