Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413321 | Method and apparatus for reducing particle contamination on wafer backside during CVD process | Bok Hoen Kim, Mario D. Silvetti, Ameeta Madhava, Davood Khalili, Martin Jay Seamons +2 more | 2002-07-02 |