Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6365518 | Method of processing a substrate in a processing chamber | Albert Lee, Chris Ngai, Tom Nowak | 2002-04-02 |
| 6355571 | Method and apparatus for reducing copper oxidation and contamination in a semiconductor device | Judy H. Huang, Sudha Rathi, Christopher S. Ngai, Bok Hoen Kim | 2002-03-12 |