Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451686 | Control of semiconductor device isolation properties through incorporation of fluorine in peteos films | Joel Glenn, Mei-Yee Shek, Judy H. Huang | 2002-09-17 |
| 6365518 | Method of processing a substrate in a processing chamber | Albert Lee, Christopher Dennis Bencher, Tom Nowak | 2002-04-02 |