Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485248 | Multiple wafer lift apparatus and associated method | — | 2002-11-26 |
| 6358573 | Mixed frequency CVD process | Sebastien Raoux, Mandar Mudholkar, Mark Fodor, Judy H. Huang, David Silvetti +2 more | 2002-03-19 |