Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432256 | Implanatation process for improving ceramic resistance to corrosion | — | 2002-08-13 |
| 6366346 | Method and apparatus for optical detection of effluent composition | Thomas Nowak, Dave Silvetti, Stefan Wolff, Russ Newman, Imad Yousif +1 more | 2002-04-02 |
| 6358573 | Mixed frequency CVD process | Mandar Mudholkar, William Taylor, Mark Fodor, Judy H. Huang, David Silvetti +2 more | 2002-03-19 |
| 6354241 | Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing | Tsutomu Tanaka, Chau Nguyen, Hari Ponnekanti, Kevin Fairbairn, Mark Fodor | 2002-03-12 |