Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354241 | Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing | Tsutomu Tanaka, Hari Ponnekanti, Kevin Fairbairn, Sebastien Raoux, Mark Fodor | 2002-03-12 |