Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6361707 | Apparatus and methods for upgraded substrate processing system with microwave plasma source | Tsutomu Tanaka, Mukul Kelkar, Kevin Fairbairn, David Cheung | 2002-03-26 |
| 6354241 | Heated electrostatic particle trap for in-situ vacuum line cleaning of a substrated processing | Tsutomu Tanaka, Chau Nguyen, Kevin Fairbairn, Sebastien Raoux, Mark Fodor | 2002-03-12 |