Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448187 | Method of improving moisture resistance of low dielectric constant films | Wai-Fan Yau, David Cheung, Nasreen Chopra, Yung-Cheng Lu, Farhad Moghadam | 2002-09-10 |
| 6362115 | In-situ generation of p-xylyiene from liquid precursors | — | 2002-03-26 |
| 6348725 | Plasma processes for depositing low dielectric constant films | David Cheung, Wai-Fan Yau, Shin-Puu Jeng, Kuo-Wei Liu, Yung-Cheng Lu +5 more | 2002-02-19 |