Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Seon-Mee Cho, Peter Wai-Man Lee, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2002-11-26 |
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | Farhad Moghadam, David Cheung, Ellie Yieh, Li-Qun Xia, Wai-Fan Yau +4 more | 2002-07-02 |