Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486082 | CVD plasma assisted lower dielectric constant sicoh film | Seon-Mee Cho, Chi-I Lang, Dian Sugiarto, Chen-An Chen, Li-Qun Xia +2 more | 2002-11-26 |
| 6374770 | Apparatus for improving film stability of halogen-doped silicon oxide films | Stuardo Robles, Anand Gupta, Virendra V. Rana, Amrita Verma | 2002-04-23 |