Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465043 | Method and apparatus for reducing particle contamination in a substrate processing chamber | — | 2002-10-15 |
| 6449521 | Decontamination of a plasma reactor using a plasma after a chamber clean | — | 2002-09-10 |
| 6374770 | Apparatus for improving film stability of halogen-doped silicon oxide films | Peter Wai-Man Lee, Stuardo Robles, Virendra V. Rana, Amrita Verma | 2002-04-23 |