Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465366 | Dual frequency plasma enhanced chemical vapor deposition of silicon carbide layers | Li-Qun Xia, Ellie Yieh | 2002-10-15 |
| 6413583 | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound | Farhad Moghadam, David Cheung, Ellie Yieh, Li-Qun Xia, Wai-Fan Yau +4 more | 2002-07-02 |
| 6352591 | Methods and apparatus for shallow trench isolation | Ellie Yieh, Li-Qun Xia | 2002-03-05 |
| 6347636 | Methods and apparatus for gettering fluorine from chamber material surfaces | Li-Qun Xia, Visweswaren Sivaramakrishnan, Ellie Yieh, Gary Fong | 2002-02-19 |
| 6348099 | Methods and apparatus for depositing premetal dielectric layer at sub-atmospheric and high temperature conditions | Li-Qun Xia, Ellie Yieh | 2002-02-19 |