Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444037 | Chamber liner for high temperature processing chamber | Jonathan Frankel | 2002-09-03 |
| 6347636 | Methods and apparatus for gettering fluorine from chamber material surfaces | Li-Qun Xia, Srinivas D. Nemani, Ellie Yieh, Gary Fong | 2002-02-19 |