Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495233 | Apparatus for distributing gases in a chemical vapor deposition system | Inna Shmurun, Scott A. Hendrickson, Shankar Venkataraman, Son T. Nguyen, I-Chun Liu | 2002-12-17 |
| 6374831 | Accelerated plasma clean | Shankar N. Chandran, Scott A. Hendrickson, Shankar Venkataraman, Ellie Yieh | 2002-04-23 |