Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495233 | Apparatus for distributing gases in a chemical vapor deposition system | Scott A. Hendrickson, Gwendolyn D. Jones, Shankar Venkataraman, Son T. Nguyen, I-Chun Liu | 2002-12-17 |