Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387207 | Integration of remote plasma generator with semiconductor processing chamber | Karthik Janakiraman, Kelly Fong, Chen-An Chen, Rong Pan, Shankar Venkataraman | 2002-05-14 |