Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6410457 | Method for improving barrier layer adhesion to HDP-FSG thin films | Hichem M'Saad, Manoj Vellaikal, Farhad Moghadam, Sameer Desai | 2002-06-25 |
| 6399489 | Barrier layer deposition using HDP-CVD | Hichem M'Saad, Seon-Mee Cho | 2002-06-04 |