Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465051 | Method of operating high density plasma CVD reactor with combined inductive and capacitive coupling | Turgut Sahin, Fred C. Redeker, Romuald Nowak, Shijian Li, Derek R. Witty | 2002-10-15 |
| 6447368 | Carriers with concentric balloons supporting a diaphragm | Clinton O. Fruitman | 2002-09-10 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2002-07-02 |
| 6409580 | Rigid polishing pad conditioner for chemical mechanical polishing tool | Wayne Lougher | 2002-06-25 |