Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468601 | Apparatus and method for white powder reduction in silicon nitride deposition using remote plasma source cleaning technology | Quanyuan Shang, Robert Robertson, Kam S. Law | 2002-10-22 |
| 6444277 | Method for depositing amorphous silicon thin films onto large area glass substrates by chemical vapor deposition at high deposition rates | Kam S. Law, Robert Robertson, Pamela Lou, Marc M. Kollrack, Angela Lee | 2002-09-03 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Robert Steger +8 more | 2002-07-02 |
| 6372633 | Method and apparatus for forming metal interconnects | Ashok Sinha, Zheng Xu, Liang Chen, Roderick C. Mosely, Daniel Carl +3 more | 2002-04-16 |
| 6338874 | Method for multilayer CVD processing in a single chamber | Kam S. Law, Robert Robertson, Pamela Lou, Marc M. Kollrack, Angela Lee | 2002-01-15 |