Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444277 | Method for depositing amorphous silicon thin films onto large area glass substrates by chemical vapor deposition at high deposition rates | Kam S. Law, Robert Robertson, Pamela Lou, Marc M. Kollrack, Dan Maydan | 2002-09-03 |
| 6338874 | Method for multilayer CVD processing in a single chamber | Kam S. Law, Robert Robertson, Pamela Lou, Marc M. Kollrack, Dan Maydan | 2002-01-15 |