Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440221 | Process chamber having improved temperature control | Shamouil Shamouilian, Ananda H. Kumar, Kadthala Ramaya Narendrnath, Eric Askarinam, Michael R. Rice +1 more | 2002-08-27 |
| 6414834 | Dielectric covered electrostatic chuck | Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan, Robert Steger +8 more | 2002-07-02 |