Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam, Gerhard Schneider +5 more | 2002-09-24 |
| 6444085 | Inductively coupled RF plasma reactor having an antenna adjacent a window electrode | Kenneth S. Collins, John Trow, Douglas A. Buchberger, Jr., Craig A. Roderick | 2002-09-03 |
| 6440221 | Process chamber having improved temperature control | Shamouil Shamouilian, Ananda H. Kumar, Kadthala Ramaya Narendrnath, Eric Askarinam, Edwin C. Weldon +1 more | 2002-08-27 |
| 6440866 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, David W. Groechel, Gerald Yin, Jon Mohn, Craig A. Roderick +5 more | 2002-08-27 |
| 6365063 | Plasma reactor having a dual mode RF power application | Kenneth S. Collins, Farahmand Askarinam, Douglas A. Buchberger, Jr., Craig A. Roderick | 2002-04-02 |