Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490144 | Support for supporting a substrate in a process chamber | Kadthala Ramaya Narendrnath, Syed H. Askari, Dennis S. Grimard, Surinder Bedi, Shamouil Shamouilian | 2002-12-03 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2002-12-03 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, You Wang, Surinder Bedi, Arnold Kholodenko, Alexander Veytser +4 more | 2002-10-08 |
| 6440221 | Process chamber having improved temperature control | Shamouil Shamouilian, Kadthala Ramaya Narendrnath, Eric Askarinam, Edwin C. Weldon, Michael R. Rice +1 more | 2002-08-27 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2002-07-02 |
| 6370006 | Electrostatic chuck having a plurality of gas inlet channels | Kadthala Ramaya Narendrnath, Shamouil Shamouilian | 2002-04-09 |