Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490145 | Substrate support pedestal | Arnold Kholodenko, Tony Kaushal, Semyon L. Kats | 2002-12-03 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2002-12-03 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, Surinder Bedi, Arnold Kholodenko, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more | 2002-10-08 |