Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490145 | Substrate support pedestal | Arnold Kholodenko, You Wang, Semyon L. Kats | 2002-12-03 |
| 6468490 | Abatement of fluorine gas from effluent | Shamouil Shamouilian, Mehran Moalem | 2002-10-22 |
| 6391146 | Erosion resistant gas energizer | Ashish Bhatnagar, Kartik Ramaswamy, Kwok Manus Wong, Shamouil Shamouilian | 2002-05-21 |
| 6367412 | Porous ceramic liner for a plasma source | Kartik Ramaswamy, Kwok Manus Wong, Ashish Bhatnagar, Mehran Moalem, Shamouil Shamouilian | 2002-04-09 |