Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494958 | Plasma chamber support with coupled electrode | Shamouil Shamouilian, Jon McChesney, Liang Wang, Alexander Veytser, Dennis S. Grimard | 2002-12-17 |
| 6478924 | Plasma chamber support having dual electrodes | Shamouil Shamouilian, Arnold Kholodenko, Liang Wang, Alexander Veytser, Dennis S. Grimard | 2002-11-12 |
| 6391146 | Erosion resistant gas energizer | Ashish Bhatnagar, Kartik Ramaswamy, Tony Kaushal, Shamouil Shamouilian | 2002-05-21 |
| 6367412 | Porous ceramic liner for a plasma source | Kartik Ramaswamy, Ashish Bhatnagar, Mehran Moalem, Tony Kaushal, Shamouil Shamouilian | 2002-04-09 |