Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494958 | Plasma chamber support with coupled electrode | Shamouil Shamouilian, Jon McChesney, Kwok Manus Wong, Liang Wang, Dennis S. Grimard | 2002-12-17 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2002-12-03 |
| 6478924 | Plasma chamber support having dual electrodes | Shamouil Shamouilian, Arnold Kholodenko, Kwok Manus Wong, Liang Wang, Dennis S. Grimard | 2002-11-12 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, You Wang, Surinder Bedi, Arnold Kholodenko, Kadthala Ramaya Narendrnath +4 more | 2002-10-08 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2002-07-02 |