Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494958 | Plasma chamber support with coupled electrode | Shamouil Shamouilian, Jon McChesney, Kwok Manus Wong, Alexander Veytser, Dennis S. Grimard | 2002-12-17 |
| 6481886 | Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system | Kadthala Ramaya Narendrnath, Shamouil Shamouilian, Paul Luscher, Hamid Noorbakhsh | 2002-11-19 |
| 6478924 | Plasma chamber support having dual electrodes | Shamouil Shamouilian, Arnold Kholodenko, Kwok Manus Wong, Alexander Veytser, Dennis S. Grimard | 2002-11-12 |