Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6481886 | Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system | Kadthala Ramaya Narendrnath, Liang Wang, Shamouil Shamouilian, Hamid Noorbakhsh | 2002-11-19 |
| 6432259 | Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates | Hamid Noorbakhsh, Michael Welch, Siamak Salimian, Hongching Shan, Kaushik Vaidya +2 more | 2002-08-13 |
| 6353210 | Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probe | Hamid Norrbakhsh, Mike Welch, Siamak Salimian, Brad L. Mays | 2002-03-05 |