Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6353210 | Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probe | Hamid Norrbakhsh, Paul Luscher, Siamak Salimian, Brad L. Mays | 2002-03-05 |