Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6364957 | Support assembly with thermal expansion compensation | Gerhard Schneider, Hamid Noorbakhsh, Bryan Pu, Kaushik Vaidya, Hung Dao +2 more | 2002-04-02 |
| 6353210 | Correction of wafer temperature drift in a plasma reactor based upon continuous wafer temperature measurements using and in-situ wafer temperature optical probe | Hamid Norrbakhsh, Mike Welch, Paul Luscher, Siamak Salimian | 2002-03-05 |