Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500299 | Chamber having improved gas feed-through and method | Richard R. Mett, Robert Greenway | 2002-12-31 |
| 6481886 | Apparatus for measuring pedestal and substrate temperature in a semiconductor wafer processing system | Kadthala Ramaya Narendrnath, Liang Wang, Shamouil Shamouilian, Paul Luscher | 2002-11-19 |
| 6432259 | Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates | Michael Welch, Siamak Salimian, Paul Luscher, Hongching Shan, Kaushik Vaidya +2 more | 2002-08-13 |
| 6364957 | Support assembly with thermal expansion compensation | Gerhard Schneider, Bryan Pu, Kaushik Vaidya, Brad L. Mays, Hung Dao +2 more | 2002-04-02 |