Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Douglas A. Buchberger, Jr., Craig A. Roderick, Eric Askarinam +5 more | 2002-09-24 |
| 6364957 | Support assembly with thermal expansion compensation | Hamid Noorbakhsh, Bryan Pu, Kaushik Vaidya, Brad L. Mays, Hung Dao +2 more | 2002-04-02 |