Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454898 | Inductively coupled RF Plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners | Kenneth S. Collins, Michael R. Rice, Craig A. Roderick, Eric Askarinam, Gerhard Schneider +5 more | 2002-09-24 |
| 6444085 | Inductively coupled RF plasma reactor having an antenna adjacent a window electrode | Kenneth S. Collins, Michael R. Rice, John Trow, Craig A. Roderick | 2002-09-03 |
| 6440866 | Plasma reactor with heated source of a polymer-hardening precursor material | Kenneth S. Collins, Michael R. Rice, David W. Groechel, Gerald Yin, Jon Mohn +5 more | 2002-08-27 |
| 6365063 | Plasma reactor having a dual mode RF power application | Kenneth S. Collins, Michael R. Rice, Farahmand Askarinam, Craig A. Roderick | 2002-04-02 |