Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432259 | Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates | Hamid Noorbakhsh, Siamak Salimian, Paul Luscher, Hongching Shan, Kaushik Vaidya +2 more | 2002-08-13 |
| 6391790 | Method and apparatus for etching photomasks | Brigitte Stoehr | 2002-05-21 |
| 6387288 | High selectivity etch using an external plasma discharge | Claes Bjorkman, Hongching Shan | 2002-05-14 |