Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494958 | Plasma chamber support with coupled electrode | Shamouil Shamouilian, Kwok Manus Wong, Liang Wang, Alexander Veytser, Dennis S. Grimard | 2002-12-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494958 | Plasma chamber support with coupled electrode | Shamouil Shamouilian, Kwok Manus Wong, Liang Wang, Alexander Veytser, Dennis S. Grimard | 2002-12-17 |