Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6490145 | Substrate support pedestal | You Wang, Tony Kaushal, Semyon L. Kats | 2002-12-03 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | You Wang, Shamouil Shamouilian, Alexander Veytser, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more | 2002-12-03 |
| 6478924 | Plasma chamber support having dual electrodes | Shamouil Shamouilian, Kwok Manus Wong, Liang Wang, Alexander Veytser, Dennis S. Grimard | 2002-11-12 |
| 6471822 | Magnetically enhanced inductively coupled plasma reactor with magnetically confined plasma | Gerald Yin, Peter Loewenhardt, Hong Chin Shan, Chii Guang Lee, Dan Katz | 2002-10-29 |
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Calvin Augason, Leonel A. Zuniga, Jun Zhao, Talex Sajoto +5 more | 2002-10-15 |
| 6464790 | Substrate support member | Semyon Sherstinsky, Calvin Augason, Samuel Wilson, Michael Stanley Phillips, Leonel A. Zuniga | 2002-10-15 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, You Wang, Surinder Bedi, Alexander Veytser, Kadthala Ramaya Narendrnath +4 more | 2002-10-08 |
| 6449871 | Semiconductor process chamber having improved gas distributor | Dmitry Lubomirsky, Guang-Jye Shiau, Peter Loewenhardt, Shamouil Shamouilian | 2002-09-17 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2002-07-02 |