Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464790 | Substrate support member | Semyon Sherstinsky, Arnold Kholodenko, Calvin Augason, Samuel Wilson, Michael Stanley Phillips | 2002-10-15 |
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Calvin Augason, Jun Zhao, Talex Sajoto, Leonid Selyutin +5 more | 2002-10-15 |
| 6350320 | Heater for processing chamber | Semyon Sherstinsky, Alison Gilliam, Paul Smith, Ted G. Yoshidome, Nitin Khurana +4 more | 2002-02-26 |