Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Calvin Augason, Leonel A. Zuniga, Jun Zhao, Leonid Selyutin +5 more | 2002-10-15 |
TS
Talex Sajoto
Overall (2002): #107,474 of 266,432Top 45%
1
Patents 2002