Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6464790 | Substrate support member | Semyon Sherstinsky, Arnold Kholodenko, Samuel Wilson, Michael Stanley Phillips, Leonel A. Zuniga | 2002-10-15 |
| 6464795 | Substrate support member for a processing chamber | Semyon Sherstinsky, Leonel A. Zuniga, Jun Zhao, Talex Sajoto, Leonid Selyutin +5 more | 2002-10-15 |