Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436819 | Nitrogen treatment of a metal nitride/metal stack | Zhi ZHANG, David Pung, Hong Mei Zhang, Roderick C. Mosely | 2002-08-20 |
| 6433314 | Direct temperature control for a component of a substrate processing chamber | Tushar Mandrekar, Anish Tolia | 2002-08-13 |
| 6395157 | Method and apparatus for sputter etch conditioning a ceramic body | Vince Burkhart, Steve Sansoni, Vijay D. Parkhe, Eugene Tzou | 2002-05-28 |
| 6358810 | Method for superior step coverage and interface control for high K dielectric capacitors and related electrodes | Charles Dornfest, John C. Egermeier | 2002-03-19 |
| 6350320 | Heater for processing chamber | Semyon Sherstinsky, Alison Gilliam, Paul Smith, Leonel A. Zuniga, Ted G. Yoshidome +4 more | 2002-02-26 |
| 6345642 | Method and apparatus for removing processing liquid from a processing liquid path | Ted G. Yoshidome, Tushar Mandrekar, Anish Tolia | 2002-02-12 |