Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423384 | HDP-CVD deposition of low dielectric constant amorphous carbon film | Kasra Khazeni, Zhengquan Tan | 2002-07-23 |
| 6395157 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Vince Burkhart, Steve Sansoni, Vijay D. Parkhe | 2002-05-28 |