Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475902 | Chemical vapor deposition of niobium barriers for copper metallization | Gilbert Hausmann, Jagadish Kalyanam | 2002-11-05 |
| 6395157 | Method and apparatus for sputter etch conditioning a ceramic body | Nitin Khurana, Vince Burkhart, Steve Sansoni, Eugene Tzou | 2002-05-28 |