Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423384 | HDP-CVD deposition of low dielectric constant amorphous carbon film | Eugene Tzou, Zhengquan Tan | 2002-07-23 |
| 6372291 | In situ deposition and integration of silicon nitride in a high density plasma reactor | Zhong Qiang Hua | 2002-04-16 |