Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372291 | In situ deposition and integration of silicon nitride in a high density plasma reactor | Kasra Khazeni | 2002-04-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372291 | In situ deposition and integration of silicon nitride in a high density plasma reactor | Kasra Khazeni | 2002-04-16 |