Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423384 | HDP-CVD deposition of low dielectric constant amorphous carbon film | Kasra Khazeni, Eugene Tzou | 2002-07-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423384 | HDP-CVD deposition of low dielectric constant amorphous carbon film | Kasra Khazeni, Eugene Tzou | 2002-07-23 |