Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500762 | Method of depositing a copper seed layer which promotes improved feature surface coverage | Imran Hashim, John C. Forster | 2002-12-31 |
| 6436819 | Nitrogen treatment of a metal nitride/metal stack | Zhi ZHANG, David Pung, Nitin Khurana, Roderick C. Mosely | 2002-08-20 |
| 6391776 | Method of depositing a copper seed layer which promotes improved feature surface coverage | Imran Hashim, John C. Forster | 2002-05-21 |
| 6355560 | Low temperature integrated metallization process and apparatus | Roderick C. Mosely, Fusen Chen, Ted Guo | 2002-03-12 |