Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458684 | Single step process for blanket-selective CVD aluminum deposition | Liang-Yuh Chen, Mehul Naik, Roderick C. Mosely | 2002-10-01 |
| 6430458 | Semi-selective chemical vapor deposition | Roderick C. Mosely, Liang-Yuh Chen | 2002-08-06 |
| 6355560 | Low temperature integrated metallization process and apparatus | Roderick C. Mosely, Hong Mei Zhang, Fusen Chen | 2002-03-12 |