Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500742 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Karl A. Littau, Ivo Raaijmakers +1 more | 2002-12-31 |
| 6458684 | Single step process for blanket-selective CVD aluminum deposition | Ted Guo, Liang-Yuh Chen, Mehul Naik | 2002-10-01 |
| 6444036 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Karl A. Littau, Ivo Raaijmakers +1 more | 2002-09-03 |
| 6436819 | Nitrogen treatment of a metal nitride/metal stack | Zhi ZHANG, David Pung, Nitin Khurana, Hong Mei Zhang | 2002-08-20 |
| 6430458 | Semi-selective chemical vapor deposition | Liang-Yuh Chen, Ted Guo | 2002-08-06 |
| 6372633 | Method and apparatus for forming metal interconnects | Dan Maydan, Ashok Sinha, Zheng Xu, Liang Chen, Daniel Carl +3 more | 2002-04-16 |
| 6355560 | Low temperature integrated metallization process and apparatus | Hong Mei Zhang, Fusen Chen, Ted Guo | 2002-03-12 |